
12.02.07
48
Simtek Confidential
SONOS Technology
SONOS Memories (Silicon-Oxide-Nitride-Oxide-Silicon)
Poly Gate
Blocking Oxide
Nitride Trapping Layer
Tunnel Oxide
SONOS Transistor
•
Charge is stored in nitride layer which acts like floating gate
•
Simple technology (topography, etching, ...)
•
Easy to integrate in base-line CMOS processes.
•
Direct tunneling (FN): lower program / erase voltages
Comentarios a estos manuales